EGE421 Microelectronic Technology
Miller indices, Crystal growth, Major steps in the fabrication of microelectronic devices (diffusion ion implantation, thermal oxidation, film deposition (physical and chemical), etching, lithography, contacts and interconnections and yield.
- Must be enrolled in the following level: Undergraduate
- Must be enrolled in one of the following majors: Computer Engineering (518), Mechanical Engineering (521), Electrical Engineering (517)
- May not be enrolled in the following class: Freshman
- EGE320 Minimum Grade of C-